One design procedure for precision positioning mechanisms.

Pneumatic Positioning System for Precision Assembly

Micro assembly is typically characterised by positioning tolerances below a few micrometers. In the case of a hybrid micro system assembly, such as optical glass fibres, micro ball lenses or micro probes for measurement tasks, even positioning accuracies in the sub-micrometer range have to be achieved. Due to the need for highly accurate assembly systems and extensive alignment procedures the a...

A Procedure for Design of the Axial Flow Fans

Trend of Precision Positioning Technology

This paper describes recent precision positioning technology. First, recent precision positioning mechanisms are introduced. Although ball screw mechanisms are widely used in industrial machines, the use of linear motors and the development of planar motors recently increase. Several linear motor mechanisms show the acceleration higher than 10G. The linear motor mechanism developed in my group ...

A Procedure for Design of the Axial Flow Fans

High precision alignment procedure for an ellipsometer.

Beam deviation in the polarizing elements is identified as a significant source of error in existing ellipsometer alignment procedures. A high precision alignment procedure that eliminates these errors is described. This procedure is less time consuming than previous methods, and its accuracy is comparable to the limit of resolution of the ellipsometer (typically 0.01-0.005 degrees ). A further...